Review Paper:
A brief overview
of X-ray photoelectron spectroscopy characterization of thin films
Ho Soonmin and Jacob A.G.
Res. J. Chem. Environ.; Vol. 28(1); 142-160;
doi: https://doi.org/10.25303/281rjce1420160; (2024)
Abstract
Preparation and characterization of nanostructured thin films have been reported
by many researchers. X-ray photoelectron spectroscopy (XPS) method has been used
over few decades in different fields such as superconductor, semiconductor, metallurgy
and catalysis. In this work, elemental oxidation state, electronic state, chemical
structure and chemical composition were investigated for metal sulfide, metal selenide,
metal oxide and metal telluride films.
Evaluation of binding energy for the obtained samples was reported. XPS spectra
showed that annealing treatment has a very strong effect on the composition of the
films. The elemental oxidation state and electronic state were strongly dependent
on the specific experimental conditions.
